@inproceedings{16276161a2e2471e839f8e013cfae723,
title = "Biologically enabled micro-and nanostencil lithography using diatoms",
abstract = "Diatoms are incredibly diverse, photosynthetic microalgae, which are widely distributed in aquatic environments. The wide array and intricate morphology of the micro-and nanostructured silica exoskeletons encasing the single-celled diatoms offer a tremendous opportunity for biologically-assisted fabrication approaches. Herein, Coscinodiscus sp. diatom frustules were aligned on a silicon substrate and subsequently employed as shadow masks during the electron beam deposition of gold. This diatom frustule enabled stencil lithography approach yielded the capacity to precisely pattern gold structures on the silicon substrate with a large range of feature sizes, ranging down to the nanoscale.",
author = "J. Cai and Anderson, \{S. W.\} and X. Wang and X. Zhang",
note = "Publisher Copyright: {\textcopyright} 2014TRF.; 2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 ; Conference date: 08-06-2014 Through 12-06-2014",
year = "2014",
doi = "10.1016/j.eml.2015.07.003",
language = "英语",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "183--186",
editor = "Allen, \{Mark G.\} and Mehran Mehregany",
booktitle = "2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014",
}