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AZO与ITO薄膜电磁散射特性对比试验研究

Translated title of the contribution: Electromagnetic Scattering Characteristics of AZO and ITO Coatings: An Experimental Study
  • Zhanhe Liu*
  • , Xiaolu Wang
  • , Jing Wang
  • , Jinzu Ji
  • , Peng Zhou
  • , Hui Zhao
  • *Corresponding author for this work
  • Zhengzhou University of Aeronautics

Research output: Contribution to journalArticlepeer-review

Abstract

Herein,we reported the electromagnetic stealth behavior of the Al-doped zinc oxide (AZO) and indium tin oxides (ITO) coatings,deposited by unbalanced magnetron sputtering on glass substrate. The influence of the sheet resistance and transmittance on the electromagnetic scattering of the AZO/ITO coatings was theoretically analyzed and experimentally evaluated by measuring the Radar Cross-Section (CRS),irradiated at 10 GHz/15 GHz and polarized in Horizontal-Horizontal (HH)/Vertical-Vertical (VV) modes. The results show that the sheet resistance strongly affected the RCS curves with similar structures of the AZO/ITO coatings. For example,as the sheet resistance increased,their RCS gains oscillatingly decreased,with that of AZO film oscillating more obviously. We suggest that the AZO and ITO coatings with the optimized sheet resistance may do an excellent job for cockpit glass stealth.

Translated title of the contributionElectromagnetic Scattering Characteristics of AZO and ITO Coatings: An Experimental Study
Original languageChinese (Traditional)
Pages (from-to)313-319
Number of pages7
JournalZhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
Volume38
Issue number4
DOIs
StatePublished - 1 Apr 2018

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