TY - GEN
T1 - Asymmetric charge transfer phenomenon and its mechanism in self-excited electrostatic actuator
AU - Liu, Zhiwei
AU - Yan, Xiaojun
AU - Qi, Mingjing
AU - Zhu, Yangsheng
AU - Zhang, Xiaoyong
AU - Lin, Liwei
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - We observe the asymmetric charge transfer phenomenon and present its mechanism in self-excited electrostatic actuator for the first time. When a conductive cantilever is excited into oscillation between two electrodes under DC voltage, it is observed to transfer more charge when it contacts the negative electrode than the positive electrode. The mechanism of this asymmetric charge transfer phenomenon is investigated and it is indicated that the amount of the transferred charge, which is directly related to output power, increases with the applied DC voltage and the parasitic capacitance at the fixed end of the cantilever. As such, this work provides further understanding and guidance for output power optimization design of the self-excited electrostatic actuator.
AB - We observe the asymmetric charge transfer phenomenon and present its mechanism in self-excited electrostatic actuator for the first time. When a conductive cantilever is excited into oscillation between two electrodes under DC voltage, it is observed to transfer more charge when it contacts the negative electrode than the positive electrode. The mechanism of this asymmetric charge transfer phenomenon is investigated and it is indicated that the amount of the transferred charge, which is directly related to output power, increases with the applied DC voltage and the parasitic capacitance at the fixed end of the cantilever. As such, this work provides further understanding and guidance for output power optimization design of the self-excited electrostatic actuator.
UR - https://www.scopus.com/pages/publications/85047008188
U2 - 10.1109/MEMSYS.2018.8346622
DO - 10.1109/MEMSYS.2018.8346622
M3 - 会议稿件
AN - SCOPUS:85047008188
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 588
EP - 591
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -