Assembly and error analysis of back focal plane-typed apertometer

  • Cuiling Zhang
  • , Haozhe Tian
  • , Bei Zhang*
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Generating reference on the back focal plane (BFP) of objective lens has been an excellent solution for numerical aperture (NA) measurement. Although the effectiveness of the concept of BFP reference has been verified theoretically and experimentally, there has been no practical apertometer based on this concept. The main challenge is how to realize the assembly of the system. In this work, we present the instrument assembly of the apertometer based on BFP reference, which mainly has three requirements. After that, we specifically investigate the influence of the location of the coverslip on BFP image and NA value by using ZEMAX. This work promotes the instrumentation of BFP-typed apertometer significantly.

Original languageEnglish
Title of host publication24th National Laser Conference and Fifteenth National Conference on Laser Technology and Optoelectronics
EditorsJianqiang Zhu, Weibiao Chen, Zhenxi Zhang, Minlin Zhong, Pu Wang, Jianrong Qiu
PublisherSPIE
ISBN (Electronic)9781510642690
DOIs
StatePublished - 2020
Event24th National Laser Conference and 15th National Conference on Laser Technology and Optoelectronics - Shanghai, China
Duration: 17 Oct 202020 Oct 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11717
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference24th National Laser Conference and 15th National Conference on Laser Technology and Optoelectronics
Country/TerritoryChina
CityShanghai
Period17/10/2020/10/20

Keywords

  • Back focal plane (BFP)
  • Defocus
  • Error analysis
  • Instrument assembly
  • Numerical aperture (NA)

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