@inproceedings{d11f0d65201c4511be4a15362f2f58f5,
title = "Application of moir{\'e} method for defect detection and strain imaging of silicon single crystals",
abstract = "Defect detection is crucial to the manufacture and evaluation of materials. However, it is still a great challenge to detect the defects in a wide field. In this paper, the two-dimensional (2D) digital multiplication moir{\'e} method is presented. The point defects of the crystal are detected visually by employing digital image processing. We mainly discuss the applications of this method to detect the defect and measure the strain in the silicon (Si) single crystals. The strain distributions in the main directions of Si single crystals are measured, and the point defects are detected. Point defects are easier to observe when the atomic structure is amplified using 2D multiplication moir{\'e}. The 2D multiplication moir{\'e} method that has been used for the point defects detection in Si single crystals described in this paper also lays an important foundation for the detection of strains and defects in the crystal structure of other materials.",
keywords = "Multiplication moir{\'e} method, Si single crystals, defect detection, sampling moir{\'e} method, strain imaging",
author = "Qingcui Huang and Qinghua Wang and Xiaojun Yan",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE. Downloading of the abstract is permitted for personal use only.; 2023 International Conference on Optical and Photonic Engineering, icOPEN 2023 ; Conference date: 27-11-2023 Through 01-12-2023",
year = "2024",
doi = "10.1117/12.3023360",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Haixia Wang and Fang Cheng and Cuong Dang and Aaron Danner and Qian Kemao",
booktitle = "International Conference on Optical and Photonic Engineering, icOPEN 2023",
address = "美国",
}