@inproceedings{03ce6047bf8f404ba40aaefa07f2a95f,
title = "Analysis on Vibration Performance of Slit-Resonant Beam Based on BP Neural Network",
abstract = "Influence of different slit sizes on performance like the natural frequency of slit-resonant beam in a MEMS resonant pressure sensor were investigated. The neural network model is established and trained by sufficient data obtained by Finite Element Method, and is used to obtain effects of different slit sizes on the performance of slit-resonant beam, which verified the results obtained by the theoretical vibration model of double-clamped resonant beam with slit structure. The results reveal the different influences of slit size, which can be used as reference for design and optimization of the slit structure and sensor performances.",
keywords = "MEMS, Neural network, Resonant sensor, Slit-resonant beam",
author = "Tao Meng and Zhonghao Sun and Xiaoming Zhang and Jiawei Zhang and Huichao Shi",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 International Conference on Sensing, Diagnostics, Prognostics, and Control, SDPC 2018 ; Conference date: 15-08-2018 Through 17-08-2018",
year = "2018",
month = jul,
day = "2",
doi = "10.1109/SDPC.2018.8664856",
language = "英语",
series = "Proceedings - 2018 International Conference on Sensing, Diagnostics, Prognostics, and Control, SDPC 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "700--704",
editor = "Chuan Li and Dian Wang and Diego Cabrera and Yong Zhou and Chunlin Zhang",
booktitle = "Proceedings - 2018 International Conference on Sensing, Diagnostics, Prognostics, and Control, SDPC 2018",
address = "美国",
}