Abstract
We report a novel electrostatic self-excited resonator driven by DC voltage that achieves variable velocity-position characteristics via applying the pre-tension/pre-compression constraint. The resonator consists of a simply supported micro-beam, two plate electrodes, and two adjustable constraint bases, and it can be under pre-compression or pre-tension constraint by adjusting the distance L between two constraint bases (when beam length l > L, the resonator is under pre-compression and when l < L, it is under pre-tension). The oscillating velocity of the beam reaches the maximum value in the position around electrodes under the pre-compression constraint and reaches the maximum value in the middle position between two electrodes under the pre-tension condition. By changing the constraint of the microbeam, the position of the maximum velocity output of the oscillating beam can be controlled. The electrostatic self-excited resonator with a simple constraint structure under DC voltage has great potential in the field of propulsion of micro-robots, such as active rotation control of flapping wings.
| Original language | English |
|---|---|
| Article number | 650 |
| Journal | Micromachines |
| Volume | 12 |
| Issue number | 6 |
| DOIs | |
| State | Published - Jun 2021 |
Keywords
- Active rotation control
- Electrostatic self-excited resonator
- Pre-tension/pre-compression constraint
- Variable velocity-position characteristics
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