An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array

Qifeng Zhu; Tao Chen; Huicong Liu; Lining Sun; Tao Wang; Chengkuo Lee; Xianhao Le; Jin Xie

doi:10.1109/NANO.2016.7751529

An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array

Qifeng Zhu
, Tao Chen
, Huicong Liu^*
, Lining Sun
, Tao Wang
, Chengkuo Lee
, Xianhao Le
, Jin Xie

^*Corresponding author for this work

Soochow University
National University of Singapore
Zhejiang University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

The development of wireless energy transfer is critical to the promotion of implantable medical devices (IMDs). In this paper, an aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducer (pMUT) array is designed, fabricated and characterized, which can be a potential power supply for IMDs. The pMUT array is ideally suitable for integration with wireless-powered system since it is fabricated from miniaturized AlN membrane array of 4×4 units. Both the simulation and experiment are conducted to characterize the pMUT device. The transmitting sensitivity of the fabricated pMUT array is measured as 83 nm/V at a resonant frequency of 527 kHz.

Original language	English
Title of host publication	16th International Conference on Nanotechnology - IEEE NANO 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	731-734
Number of pages	4
ISBN (Electronic)	9781509039142
DOIs	https://doi.org/10.1109/NANO.2016.7751529
State	Published - 21 Nov 2016
Externally published	Yes
Event	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan Duration: 22 Aug 2016 → 25 Aug 2016

Publication series

Name	16th International Conference on Nanotechnology - IEEE NANO 2016

Conference

Conference	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Country/Territory	Japan
City	Sendai
Period	22/08/16 → 25/08/16

Access to Document

10.1109/NANO.2016.7751529

Cite this

Zhu, Q., Chen, T., Liu, H., Sun, L., Wang, T., Lee, C., Le, X., & Xie, J. (2016). An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 731-734). Article 7751529 (16th International Conference on Nanotechnology - IEEE NANO 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751529

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title = "An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array",

abstract = "The development of wireless energy transfer is critical to the promotion of implantable medical devices (IMDs). In this paper, an aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducer (pMUT) array is designed, fabricated and characterized, which can be a potential power supply for IMDs. The pMUT array is ideally suitable for integration with wireless-powered system since it is fabricated from miniaturized AlN membrane array of 4×4 units. Both the simulation and experiment are conducted to characterize the pMUT device. The transmitting sensitivity of the fabricated pMUT array is measured as 83 nm/V at a resonant frequency of 527 kHz.",

author = "Qifeng Zhu and Tao Chen and Huicong Liu and Lining Sun and Tao Wang and Chengkuo Lee and Xianhao Le and Jin Xie",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 ; Conference date: 22-08-2016 Through 25-08-2016",

year = "2016",

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doi = "10.1109/NANO.2016.7751529",

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Zhu, Q, Chen, T, Liu, H, Sun, L, Wang, T, Lee, C, Le, X & Xie, J 2016, An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751529, 16th International Conference on Nanotechnology - IEEE NANO 2016, Institute of Electrical and Electronics Engineers Inc., pp. 731-734, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 22/08/16. https://doi.org/10.1109/NANO.2016.7751529

An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array. / Zhu, Qifeng; Chen, Tao; Liu, Huicong et al.
16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 731-734 7751529 (16th International Conference on Nanotechnology - IEEE NANO 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array

AU - Zhu, Qifeng

AU - Chen, Tao

AU - Liu, Huicong

AU - Sun, Lining

AU - Wang, Tao

AU - Lee, Chengkuo

AU - Le, Xianhao

AU - Xie, Jin

PY - 2016/11/21

Y1 - 2016/11/21

N2 - The development of wireless energy transfer is critical to the promotion of implantable medical devices (IMDs). In this paper, an aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducer (pMUT) array is designed, fabricated and characterized, which can be a potential power supply for IMDs. The pMUT array is ideally suitable for integration with wireless-powered system since it is fabricated from miniaturized AlN membrane array of 4×4 units. Both the simulation and experiment are conducted to characterize the pMUT device. The transmitting sensitivity of the fabricated pMUT array is measured as 83 nm/V at a resonant frequency of 527 kHz.

AB - The development of wireless energy transfer is critical to the promotion of implantable medical devices (IMDs). In this paper, an aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducer (pMUT) array is designed, fabricated and characterized, which can be a potential power supply for IMDs. The pMUT array is ideally suitable for integration with wireless-powered system since it is fabricated from miniaturized AlN membrane array of 4×4 units. Both the simulation and experiment are conducted to characterize the pMUT device. The transmitting sensitivity of the fabricated pMUT array is measured as 83 nm/V at a resonant frequency of 527 kHz.

UR - https://www.scopus.com/pages/publications/85006954236

U2 - 10.1109/NANO.2016.7751529

DO - 10.1109/NANO.2016.7751529

M3 - 会议稿件

AN - SCOPUS:85006954236

T3 - 16th International Conference on Nanotechnology - IEEE NANO 2016

SP - 731

EP - 734

BT - 16th International Conference on Nanotechnology - IEEE NANO 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016

Y2 - 22 August 2016 through 25 August 2016

ER -

Zhu Q, Chen T, Liu H, Sun L, Wang T, Lee C et al. An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array. In 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 731-734. 7751529. (16th International Conference on Nanotechnology - IEEE NANO 2016). doi: 10.1109/NANO.2016.7751529

An AlN-based piezoelectric micro-machined ultrasonic transducer (pMUT) array

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