Achieving excellent coercivity-resistivity synergy in (Fe_xCo_yNi_z)₈₇Zr₁₃ soft magnetic alloy films via composition optimization and annealing treatment

Maintaining low coercivity and high resistivity is a key development direction for advanced soft magnetic materials. In the present work, the optimization of magnetic element composition (Fe/Co/Ni ratios) and low-temperature annealing treatment were employed to prepare high-performance (Fe_xCo_yNi_z)₈₇Zr₁₃ amorphous soft magnetic alloy films via magnetron sputtering. By regulating the Fe/Co/Ni ratio, the films exhibited exceptional soft magnetic properties, including low coercivity (0.5–11.4 Oe), high saturation magnetization (804.8–1237.1 emu·cm⁻³), and high resistivity (>181.5 μΩ·cm). A moderate Ni content (15–25 at%) was found to yield the most favorable synergy, significantly lowering coercivity without markedly compromising magnetization. After annealing at 250 °C for 1 h, the films showed further enhanced magnetic softness, achieving a coercivity reduction exceeding 75.4 % while retaining the amorphous structure and maintaining a high resistivity (>173.1 μΩ·cm). Magnetic domain imaging revealed that Ni/Fe-rich films characterized ripple-domain–dominated reversible rotation, whereas Co-rich films showed domain-wall motion–driven behavior with delayed switching, underscoring the critical interplay between composition and domain behavior. These findings provide novel insights into the development of advanced soft magnetic materials having both low coercivity and high resistivity.