@inproceedings{2d2ba4d00cda4e5093bf21313e99b6d9,
title = "A Study on the Interface Diffusion of In2O3/ITO Multilayer Thin-Film Thermocouple",
abstract = "In2O3/ITO multilayer thin film thermocouple is a new type of semiconductor thin-film thermocouple, which has broad application prospects. The interface diffusion between the layers is the main cause of its thermal oxidation failure. In this paper, an interface diffusion model of multilayer films is established based on Fick's second law. A sample of In2O3/ITO thin-film thermocouple was prepared, then designed and conducted high temperature test. According to the test results, the diffusion of substances between the film layers was analyzed. Based on the established interface diffusion model, a simulation calculation is carried out. The influence of interface diffusion on the life of In2O3 and ITO sensitive layer was quantitatively analyzed.",
keywords = "High Temperature Test, In2O3/ITO, Interface Diffusion, Simulation Analysis, Thin-film Thermocouple",
author = "Xue, \{Yu Qing\} and Wang, \{Yi Dan\} and Lei, \{Dong Yang\} and Sun, \{Yu Feng\}",
note = "Publisher Copyright: {\textcopyright} 2022 Trans Tech Publications Ltd, Switzerland.; 9th Annual International Conference on Material Science and Engineering, ICMSE 2021 ; Conference date: 22-07-2021 Through 24-07-2021",
year = "2022",
doi = "10.4028/www.scientific.net/KEM.905.174",
language = "英语",
isbn = "9783035715361",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "174--183",
editor = "\{Hage Chehade\}, Fadi and Chen Hu and Ke Wang",
booktitle = "Material Science and Engineering - Selected peer-reviwed full text papers from the 9th Annual International Conference on Material Science and Engineering, ICMSE 2021",
address = "瑞士",
}