A novel piezoelectric hybrid ceramic solid-fluid actuator

A novel hybrid solid-fluid actuator using piezoelectric components is described. The hybrid solid-fluid actuator is composed of two piezoelectric pumps which take advantage of the high energy density of piezoelectricity components. The pumps replacing the check valves which are needed in common incorporate actuators overcome the frequency bottleneck of the check valves. Consequently the actuator effectively utilizes the high frequency characteristic of the piezoelectric ceramics and the integrative design can avoid the dispersed pipeline of common hydraulic actuators. Simulation data indicates that the actuator has better performance: small volume, large displacement, broad bandwidth, high load, good dynamic characteristic and work only need electric power.