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A microdroplet-based capacitive sensing matrix for tactile applications

  • B. Nie
  • , R. Li
  • , J. D. Brandt
  • , T. Pan*
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we present a highly sensitive microdroplet-based interfacial capacitive sensor matrix device, achieving ultrahigh sensitivity of 0.4nF/kPa and minimal detectable pressure of 33Pa at a 3×3×0.2mm³ packaging. The microdroplet-based sensor is comprised of an array of nanoliter ionic droplets sandwiched between two flexible substrates with patterned transparent electrodes. The sensing principle primarily relies on high elasticity of the sensing droplet and large capacitance presented at the electrode-electrolyte interface. Theoretical analyses and experimental investigations on several design parameters are thoroughly conducted to characterize. Finally, the microdroplet-based pressure sensor is successfully utilized for tactile sensing applications, such as Braille characters scanning and non-invasive cardiovascular pressure recording.

Original languageEnglish
Title of host publication2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
EditorsMark G. Allen, Mehran Mehregany
PublisherTransducer Research Foundation
Pages351-354
Number of pages4
ISBN (Electronic)9781940470016
DOIs
StatePublished - 2014
Externally publishedYes
Event2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 - Hilton Head Island, United States
Duration: 8 Jun 201412 Jun 2014

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
Country/TerritoryUnited States
CityHilton Head Island
Period8/06/1412/06/14

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