TY - GEN
T1 - A MEMS Piezoresistive 3D Force Sensor for Robotic Dexterous Hands
AU - Li, Junyan
AU - Zhang, Hangwei
AU - Xu, Can
AU - Huo, Wenjun
AU - Li, Aomen
AU - Ma, Shuai
AU - Xu, Guyi
AU - Li, Dongsheng
AU - Liu, Huicong
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - Tactile sensors for robot have received widespread attention from researchers. However, current robot tactile sensors are mainly based on flexible materials, which have large volume, poor consistency, and poor stability. This paper proposes a micro-electro-mechanical system (MEMS) piezoresistive three-dimensional (3D) force sensor for robot tactile perception based on a rigid-flexible coupling structure. The sensor, which is composed of a MEMS force sensing chip featuring four cantilevers, an encapsulated shell, and an elastic force transmission layer, is fabricated through a series of MEMS processes. When the robotic fingertip is subjected to a force, the resistances of piezoresistors on the micro-cantilevers will be changed, transforming the tactile force into electrical signals. The proposed sensor exhibits linear response to 3D forces, possess fast response capability ( 30 ms). This sensor has great potential for applications in robot tactile perception and human-machine interaction.
AB - Tactile sensors for robot have received widespread attention from researchers. However, current robot tactile sensors are mainly based on flexible materials, which have large volume, poor consistency, and poor stability. This paper proposes a micro-electro-mechanical system (MEMS) piezoresistive three-dimensional (3D) force sensor for robot tactile perception based on a rigid-flexible coupling structure. The sensor, which is composed of a MEMS force sensing chip featuring four cantilevers, an encapsulated shell, and an elastic force transmission layer, is fabricated through a series of MEMS processes. When the robotic fingertip is subjected to a force, the resistances of piezoresistors on the micro-cantilevers will be changed, transforming the tactile force into electrical signals. The proposed sensor exhibits linear response to 3D forces, possess fast response capability ( 30 ms). This sensor has great potential for applications in robot tactile perception and human-machine interaction.
UR - https://www.scopus.com/pages/publications/105018736064
U2 - 10.1109/NEMS67320.2025.11169976
DO - 10.1109/NEMS67320.2025.11169976
M3 - 会议稿件
AN - SCOPUS:105018736064
T3 - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
SP - 49
EP - 52
BT - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
Y2 - 11 May 2025 through 14 May 2025
ER -