A MEMS All-SiC Accelerometer and its Application in Vibration Test of Aero-Engine†

Yanxin Zhai; Tiantong Xu; Guoqiang Xu; Hengyi Wang; Xiaoda Cao; Haiwang Li

doi:10.1002/tee.23944

A MEMS All-SiC Accelerometer and its Application in Vibration Test of Aero-Engine†

Yanxin Zhai
, Tiantong Xu
, Guoqiang Xu
, Hengyi Wang
, Xiaoda Cao
, Haiwang Li^*

^*Corresponding author for this work

Research institute of Aero-Engine

Beihang University

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ω μm, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.

Original language	English
Pages (from-to)	778-784
Number of pages	7
Journal	IEEJ Transactions on Electrical and Electronic Engineering
Volume	19
Issue number	5
DOIs	https://doi.org/10.1002/tee.23944
State	Published - May 2024

Keywords

MEMS
accelerometer
aero-engine applications
silicon carbide

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10.1002/tee.23944

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title = "A MEMS All-SiC Accelerometer and its Application in Vibration Test of Aero-Engine†",

abstract = "This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ω μm, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8\%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.",

keywords = "MEMS, accelerometer, aero-engine applications, silicon carbide",

author = "Yanxin Zhai and Tiantong Xu and Guoqiang Xu and Hengyi Wang and Xiaoda Cao and Haiwang Li",

note = "Publisher Copyright: {\textcopyright} 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.",

year = "2024",

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AU - Zhai, Yanxin

AU - Xu, Tiantong

AU - Xu, Guoqiang

AU - Wang, Hengyi

AU - Cao, Xiaoda

AU - Li, Haiwang

PY - 2024/5

Y1 - 2024/5

N2 - This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ω μm, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.

AB - This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ω μm, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.

KW - MEMS

KW - accelerometer

KW - aero-engine applications

KW - silicon carbide

UR - https://www.scopus.com/pages/publications/85176574888

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JO - IEEJ Transactions on Electrical and Electronic Engineering

JF - IEEJ Transactions on Electrical and Electronic Engineering

IS - 5

ER -

A MEMS All-SiC Accelerometer and its Application in Vibration Test of Aero-Engine†

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Keywords

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