A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

Chao Qi; Keita Nagai; Ming Ji; Yu Miyahara; Naohiro Sugita; Tadahiko Shinshi; Masaki Nakano; Chiaki Sato

doi:10.1109/PowerMEMS56853.2022.10007558

A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

Chao Qi^*
, Keita Nagai
, Ming Ji
, Yu Miyahara
, Naohiro Sugita
, Tadahiko Shinshi^*
, Masaki Nakano
, Chiaki Sato

^*Corresponding author for this work

Institute of Science Tokyo
Nagasaki University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

Original language	English
Title of host publication	2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	309-310
Number of pages	2
ISBN (Electronic)	9781665493062
DOIs	https://doi.org/10.1109/PowerMEMS56853.2022.10007558
State	Published - 2022
Externally published	Yes
Event	21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 - Salt Lake City, United States Duration: 12 Dec 2022 → 15 Dec 2022

Publication series

Name	2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

Conference

Conference	21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022
Country/Territory	United States
City	Salt Lake City
Period	12/12/22 → 15/12/22

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

FePt Thick Film
Magnetic Actuator
Magnetic MEMS
Micropump

Access to Document

10.1109/PowerMEMS56853.2022.10007558

Cite this

Qi, C., Nagai, K., Ji, M., Miyahara, Y., Sugita, N., Shinshi, T., Nakano, M., & Sato, C. (2022). A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. In 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 (pp. 309-310). (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PowerMEMS56853.2022.10007558

Qi, Chao ; Nagai, Keita ; Ji, Ming et al. / A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 309-310 (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022).

@inproceedings{c84d0b7ded3b4a9d8c8b4e25eeef5993,

title = "A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps",

abstract = "This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.",

keywords = "FePt Thick Film, Magnetic Actuator, Magnetic MEMS, Micropump",

author = "Chao Qi and Keita Nagai and Ming Ji and Yu Miyahara and Naohiro Sugita and Tadahiko Shinshi and Masaki Nakano and Chiaki Sato",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 ; Conference date: 12-12-2022 Through 15-12-2022",

year = "2022",

doi = "10.1109/PowerMEMS56853.2022.10007558",

language = "英语",

series = "2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "309--310",

booktitle = "2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022",

address = "美国",

}

Qi, C, Nagai, K, Ji, M, Miyahara, Y, Sugita, N, Shinshi, T, Nakano, M & Sato, C 2022, A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. in 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022, Institute of Electrical and Electronics Engineers Inc., pp. 309-310, 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022, Salt Lake City, United States, 12/12/22. https://doi.org/10.1109/PowerMEMS56853.2022.10007558

A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. / Qi, Chao; Nagai, Keita; Ji, Ming et al.
2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 309-310 (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

AU - Qi, Chao

AU - Nagai, Keita

AU - Ji, Ming

AU - Miyahara, Yu

AU - Sugita, Naohiro

AU - Shinshi, Tadahiko

AU - Nakano, Masaki

AU - Sato, Chiaki

PY - 2022

Y1 - 2022

N2 - This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

AB - This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

KW - FePt Thick Film

KW - Magnetic Actuator

KW - Magnetic MEMS

KW - Micropump

UR - https://www.scopus.com/pages/publications/85147034395

U2 - 10.1109/PowerMEMS56853.2022.10007558

DO - 10.1109/PowerMEMS56853.2022.10007558

M3 - 会议稿件

AN - SCOPUS:85147034395

T3 - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

SP - 309

EP - 310

BT - 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022

Y2 - 12 December 2022 through 15 December 2022

ER -

Qi C, Nagai K, Ji M, Miyahara Y, Sugita N, Shinshi T et al. A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. In 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 309-310. (2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022). doi: 10.1109/PowerMEMS56853.2022.10007558

A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

Other files and links

Fingerprint

Cite this