A low-frequency MEMS piezoelectric energy harvesting system based on frequency up-conversion mechanism

Manjuan Huang; Cheng Hou; Yunfei Li; Huicong Liu; Fengxia Wang; Tao Chen; Zhan Yang; Gang Tang; Lining Sun

doi:10.3390/mi10100639

A low-frequency MEMS piezoelectric energy harvesting system based on frequency up-conversion mechanism

Manjuan Huang
, Cheng Hou
, Yunfei Li
, Huicong Liu^*
, Fengxia Wang
, Tao Chen
, Zhan Yang
, Gang Tang
, Lining Sun

^*Corresponding author for this work

Soochow University
Nanchang Institute of Technology

Research output: Contribution to journal › Article › peer-review

60 Scopus citations

Abstract

This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g^-1·Hz^-1·cm^-3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario.

Original language	English
Article number	639
Journal	Micromachines
Volume	10
Issue number	10
DOIs	https://doi.org/10.3390/mi10100639
State	Published - 1 Oct 2019
Externally published	Yes

Keywords

Frequency up-conversion mechanism
Impact
MEMS
PZT thick film
Piezoelectric vibration energy harvester

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10.3390/mi10100639

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@article{8a887c6ec43b490abd992ab4cd9d406a,

title = "A low-frequency MEMS piezoelectric energy harvesting system based on frequency up-conversion mechanism",

abstract = "This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g-1·Hz-1·cm-3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario.",

keywords = "Frequency up-conversion mechanism, Impact, MEMS, PZT thick film, Piezoelectric vibration energy harvester",

author = "Manjuan Huang and Cheng Hou and Yunfei Li and Huicong Liu and Fengxia Wang and Tao Chen and Zhan Yang and Gang Tang and Lining Sun",

note = "Publisher Copyright: {\textcopyright} 2019 by the authors.",

year = "2019",

month = oct,

day = "1",

doi = "10.3390/mi10100639",

language = "英语",

volume = "10",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

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T1 - A low-frequency MEMS piezoelectric energy harvesting system based on frequency up-conversion mechanism

AU - Huang, Manjuan

AU - Hou, Cheng

AU - Li, Yunfei

AU - Liu, Huicong

AU - Wang, Fengxia

AU - Chen, Tao

AU - Yang, Zhan

AU - Tang, Gang

AU - Sun, Lining

PY - 2019/10/1

Y1 - 2019/10/1

N2 - This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g-1·Hz-1·cm-3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario.

AB - This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g-1·Hz-1·cm-3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario.

KW - Frequency up-conversion mechanism

KW - Impact

KW - MEMS

KW - PZT thick film

KW - Piezoelectric vibration energy harvester

UR - https://www.scopus.com/pages/publications/85073199657

U2 - 10.3390/mi10100639

DO - 10.3390/mi10100639

M3 - 文章

AN - SCOPUS:85073199657

SN - 2072-666X

VL - 10

JO - Micromachines

JF - Micromachines

IS - 10

M1 - 639

ER -

A low-frequency MEMS piezoelectric energy harvesting system based on frequency up-conversion mechanism

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Keywords

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