@inproceedings{7231d6adda724b81b85875bc2238c486,
title = "A high-temperature endurable MOEMS accelerometer based on 6H-SiC",
abstract = "A novel dual optical path MOEMS accelerometer based on 6H-SiC for high-temperature environment application is designed, which lays the theoretical and experimental foundation to obtain the optimal optical sensing method and SiC-based micro-mechanism of accelerometer.",
author = "Li Hui and Liu Liying and Huang Tingfeng and Feng Lishuang and Zhou Zhen",
year = "2016",
doi = "10.1364/sensors.2016.sew3d.7",
language = "英语",
isbn = "9781943580149",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Optical Sensors, Sensors 2016",
address = "美国",
note = "Optical Sensors, Sensors 2016 ; Conference date: 18-07-2016 Through 20-07-2016",
}