@inproceedings{d43c446913154ed0b92d9af6a1e320b6,
title = "A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument",
abstract = "The paper reports a microcantilever-based microprobe that will be applied at a versatile instrument in combination of atomic force microscopy with mass spectrometry. Due to the special requirements for the microprobe, the probe is expected to equip with an in-plane sharp tip for high-resolution image scanning and easy sample electrical extraction, as well as a self-actuated cantilever that owns huge deflection in order to freely switch between two terminals. Therefore, a new concept of new actuation and vibrating mode for cantilevers is presented, where a crank-slider structural cantilever connected to integrated in-plane actuators and a sharp tip are monolithically constructed, serving as a functional microprobe. A newly wet and dry etching hybrid method is introduced to easily fabricate the sharp tip with various aspect ratios. To get big out-of-plane deflection of cantilever, optimized design has been considered and carefully calculated, finally proved by experimental results.",
keywords = "Huge deflection, Microcantilever, Microprobe",
author = "X. Chen and Lee, \{D. W.\}",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969658",
language = "英语",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "1721--1724",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}