@inproceedings{f15c10d5535f4a969104f00b7e86a0c6,
title = "A DC drive electrostatic comb actuator based on self-excited vibration",
abstract = "We report a novel electrostatic comb actuator for linear motion output by electrostatically induced self-vibration under a direct-current (DC) power supply. The comb actuator contains 4 pairs of electrodes and has a total mass of 60 mg. It can achieve output displacement with amplitude range from 0.9 mm to 1.4 mm at a vibration frequency of about 220 Hz. The power density can reach 32.04 W/kg, which is 4 times of the previous actuators with a single-pair of electrodes. The comb actuator could open up new directions for electrostatic force utilization in millimeter scale.",
author = "Yangsheng Zhu and Xiaojun Yan and Mingjing Qi and Zhiwei Liu and Xiaoyong Zhang and Liwei Lin",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",
year = "2018",
month = apr,
day = "24",
doi = "10.1109/MEMSYS.2018.8346623",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "592--595",
booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",
address = "美国",
}