TY - GEN
T1 - A Calorimetric Differential Pressure Sensor for Underwater Flow Sensing
AU - Cao, Yudong
AU - Sheng, Tianyu
AU - Gong, Zheng
AU - Zhang, Deyuan
AU - Cai, Jun
AU - Jiang, Yonggang
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - Accurate perception of pressure is essential for unmanned underwater vehicles (UUVs) to achieve intelligent flow analysis. This paper presents a novel calorimetric differential pressure sensor for underwater sensing, which consists of pressure chambers and a pair of micro-cantilever beams with calorimetric sensing elements. The sensor converts differential pressure into flow velocity at the tip of the cantilever beams and measures it with the calorimetric sensing elements. The proposed sensor achieves excellent differential pressure resolution (0.027 Pa) with a detect range of 400 Pa, as well as high repeatability (0.23% FS). Overall, the proposed sensor has many promising applications in underwater pressure sensing and flow assisted analysis of UUVs.
AB - Accurate perception of pressure is essential for unmanned underwater vehicles (UUVs) to achieve intelligent flow analysis. This paper presents a novel calorimetric differential pressure sensor for underwater sensing, which consists of pressure chambers and a pair of micro-cantilever beams with calorimetric sensing elements. The sensor converts differential pressure into flow velocity at the tip of the cantilever beams and measures it with the calorimetric sensing elements. The proposed sensor achieves excellent differential pressure resolution (0.027 Pa) with a detect range of 400 Pa, as well as high repeatability (0.23% FS). Overall, the proposed sensor has many promising applications in underwater pressure sensing and flow assisted analysis of UUVs.
UR - https://www.scopus.com/pages/publications/105018736293
U2 - 10.1109/NEMS67320.2025.11170112
DO - 10.1109/NEMS67320.2025.11170112
M3 - 会议稿件
AN - SCOPUS:105018736293
T3 - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
SP - 151
EP - 154
BT - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
Y2 - 11 May 2025 through 14 May 2025
ER -