螺线管线圈式 MEMS 永磁电动机的热分析

A thermal analysis of a solenoid coil type MEMS permanent-magnet motor was conducted， and the preliminary temperature measurement plan was given. The overall design scheme of this MEMS permanent-magnet motor was introduced. The windings with silicon dioxide insulation inside the single crystal silicon substrate were selected to achieve the purpose of excellent heat dissipation performance. The thermal-structural coupling simulation was carried out by using the steady-state heat transfer and static structure mechanics modules of ANSYS. On this basis， it was verified by numerical simulation that the temperature distribution of the motor stator was uniform， and the winding and the substrate without temperature gradient can be considered. Through thermal-structural coupling simulation，it was concluded that the maximum operating temperature without expansion mismatch was 86 °C and the corresponding maximum heat loss power was 2.83 W. Based on this， the rated operating performance of the motor was estimated， and the temperature tolerance capacity and high power density potential of the motor were verified. The rated output power of the final design was 0.362 W， and the calculated design power density was 0.117 W/g.