薄膜热电偶热氧化可靠性及结构优化

The part of an aero engine with the highest temperature is the turbine blade. The film material is prepared on the surface of the object to be measured to form a thermocouple sensor, which can timely and effectively measure the temperature of the turbine blade. The diffusion failure of the thermal oxidation interface between multilayer films of thin film thermocoupleis one of the main reasons for the low reliability of thin film thermocouples. One of the main causes of the low reliability of thin film thermocouples is the diffusion failure of the thermal oxidation interface between multilayer layers. Based on Fick's second law, this paper proposes a diffusion reliability model of multilayer film to quantitatively describe the diffusion failure mechanism of thin film thermocouples. Through simulation calculation and particle swarm optimization, the optimal structure of each layer is obtained with the goal of maximizing the lifetime of thin-film, It provides a certain method reference for improving the lifetime of thin film thermocouple in structure and technology.