微型高速仿生机器人

A micro high-speed bionic robot was designed and fabricated based on a 3.5 mm× 3 mm×3 mm MEMS miniature linear motor. With a thrust coefficient of 13 mN/A， the motor had advantages of microscale dimensions and large stroke output. A linkage-free locomotion mechanism was developed to reduce the complexity of conventional transmission systems，enhancing the motion efficiency and flexibility. A three-part leg structure—composed of a front leg， a rear leg， and limiter—was implemented. Multi-parameter coupled simulations identified an optimal angle combination of angles between the front leg，the rear leg and the ground are 95° and 80° respectively. A high-friction surface inspired by tree frogs was introduced. Fabricated via polydimethylsiloxane (PDMS) soft lithography，the structure increased the friction coefficient by 2.5 times and exhibited less than 10% degradation under wet conditions， significantly improving the ground adhesion and stability in complex environments. With overall dimensions of 5 mm×5 mm×4 mm and a mass of 88 mg，the robot achieved a maximum speed of 48 body lengths per second，demonstrating outstanding locomotion performance under optimal operating conditions (0.45 A，90 Hz).