双层亚波长光栅微位移传感系统结构优化设计与性能仿真

Yujiao Zhao; Zhen Zhou

doi:10.16818/j.issn1001-5868.2019.05.005

双层亚波长光栅微位移传感系统结构优化设计与性能仿真

Translated title of the contribution: Structural Optimization and Performance Simulation of Dual Subwavelength Grating Micro-Displacement Sensing System

Yujiao Zhao
, Zhen Zhou^*

^*Corresponding author for this work

School of Instrumentation and Optoelectronic Engineering

Beihang University

Research output: Contribution to journal › Article › peer-review

Abstract

In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.

Translated title of the contribution	Structural Optimization and Performance Simulation of Dual Subwavelength Grating Micro-Displacement Sensing System
Original language	Chinese (Traditional)
Pages (from-to)	626-630
Number of pages	5
Journal	Bandaoti Guangdian/Semiconductor Optoelectronics
Volume	40
Issue number	5
DOIs	https://doi.org/10.16818/j.issn1001-5868.2019.05.005
State	Published - 1 Oct 2019

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title = "双层亚波长光栅微位移传感系统结构优化设计与性能仿真",

abstract = "In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.",

keywords = "Evanescent wave, Micro-displacement detection, Rigorous coupled-wave theory, Simulation, Sub-wavelength grating",

author = "Yujiao Zhao and Zhen Zhou",

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doi = "10.16818/j.issn1001-5868.2019.05.005",

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AU - Zhou, Zhen

PY - 2019/10/1

Y1 - 2019/10/1

N2 - In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.

AB - In this paper, the relationship between the transmittance of zero-order diffracted light and the in-plane and out-of-plane displacement of the dual subwavelength gratings was analyzed, and the influence of key structural parameters on the sensitivity of the displacement detection was simulated with Rsoft software. The structure of the sensing system was optimized and simulations were performed to make comparisons on its performance. The high sensitivity of sub-wavelength grating displacement detection was verified in theory.

KW - Evanescent wave

KW - Micro-displacement detection

KW - Rigorous coupled-wave theory

KW - Simulation

KW - Sub-wavelength grating

UR - https://www.scopus.com/pages/publications/85074999779

U2 - 10.16818/j.issn1001-5868.2019.05.005

DO - 10.16818/j.issn1001-5868.2019.05.005

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JO - Bandaoti Guangdian/Semiconductor Optoelectronics

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IS - 5

ER -

双层亚波长光栅微位移传感系统结构优化设计与性能仿真

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