光纤法珀式SiC耐高温压力传感器的制造与测试

In order to meet the urgent needs of in-situ pressure detections at high temperatures, a fiber Fabry-Perot SiC high-temperature pressure sensor was fabricated based on the excellent high temperature resistance of SiC materials. A SiC sensor diaphragm with surface roughness Ra about 11.9 nm was fabricated via an ultrasonic vibration mill-grinding(UVMG) method. A direct bonding using SiC wafer hydrofluoric acid was used to realize the high strength air tightness bonding between SiC sensing diaphragm and SiC substrate. The prepared SiC high temperature resistant pressure sensor prototype was tested in high temperature conditions after a high temperature pressure test system was built. Results demonstrate the sensing capabilities for pressures from 0 to 4 MPa at 600 ℃. The pressure sensor illustrates a good linearity(R2>0.99). The pressure sensitivity is measured to be as 104.42 nm/MPa at 600 ℃.